Semiconductor Fused Quartz Glass Boat / Silicon Wafer Carrier Holder / Quartz Combustion Boat
The most commonly used silicon wafer carrier in the semiconductor industry is called fused quartz boat, also known as quartz glass carrier/quartz wafer holder. Fused quartz glass boat used in the laboratory is a container for heating, also known as quartz combustion boat. As its name implies, quartz boat is a carrier / holder or container made of fused silica quartz glass. Quartz wafer boat is generally used in the chemical, metallurgical, electrical, scientific research, photovoltaic and semiconductor industries.
Quartz wafer boat in the semiconductor industry come in different sizes depending on the size and thickness of the silicon wafers to be used. The regular sizes are 6 inches, 7 inches, and 8 inches. This size refers to diameter of the silicon quartz wafer. The groove width of quartz boat needs to be determined based on the thickness of the silicon wafer. The conventional groove width should be at least 1mm or more. But we can also customize smaller slot widths.
Customizing large-sized quartz wafer boats is difficult. Not only does it require larger materials, but it also requires larger fixtures for fixation. Because small deviations often lead to overall size errors. Therefore, producing large-sized quartz boats requires better equipment and more experienced technicians.
Quartz combustion boat used in the laboratory is a relatively simple type of container quartz boat. Usually, quartz tubes can be cut to size and then welded together. At this point, the welding process is the most important technical standard.
Our company has years of experience in customizing various types and sizes of quartz wafer boats, quartz carriers and quartz glass wafer holders. Welcome to inquire.